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[IEEE ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA (4-7 June 2000)] ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) - Calculation of ion energy distributions from RF plasmas using a simplified kinetic model

✍ Scribed by Misakian, M.; Wang, Y.

Book ID: 118233512
Publisher: IEEE
Year: 2000
Weight: 110 KB
Volume: 0
Category: Article
ISBN-13: 9780780359826
DOI: 10.1109/plasma.2000.854967

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