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[IEEE Frequency Control Symposium - New Orleans, LA, USA (29-31 May 2002)] Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234) - Air-backed Al/ZnO/Al film bulk acoustic resonator without any support layer

✍ Scribed by Hao Zhang, ; Eun Sok Kim,

Book ID: 118259832
Publisher: IEEE
Year: 2002
Weight: 537 KB
Volume: 0
Category: Article
ISBN-13: 9780780370821
DOI: 10.1109/freq.2002.1075850

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