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[IEEE ESSCIRC 2004 - 29th European Solid-State Circuits Conference - Estoril, Portugal (16-18 Sept. 2003)] ESSCIRC 2004 - 29th European Solid-State Circuits Conference (IEEE Cat. No.03EX705) - Monolithic SOI-MEMS capacitive pressure sensor with standard bulk CMOS readout circuit

✍ Scribed by Ylimaula, M.; Aberg, M.; Kiihamaki, J.; Ronkainen, H.

Book ID: 115508014
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 257 KB
Volume: 0
Category: Article
ISBN-13: 9780780379954
DOI: 10.1109/esscirc.2003.1257209

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