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[IEEE Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004. - Atlanta, GA, USA (8-10 Sept. 2004)] Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004. - High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology

✍ Scribed by Pourkamali, S.; Ayazi, F.

Book ID: 121232893
Publisher: IEEE
Year: 2004
Weight: 865 KB
Category: Article
ISBN-13: 9780780387034
DOI: 10.1109/SMIC.2004.1398189

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