✦ LIBER ✦

[IEEE Devices (COMMAD) - Canberra, Australia (2010.12.12-2010.12.15)] 2010 Conference on Optoelectronic and Microelectronic Materials and Devices - Reactive ion etching of porous silicon for MEMS applications

✍ Scribed by Lai, Meifang; Parish, Giacinta; Liu, Yinong; Keating, Adrian J.

No coin nor oath required. For personal study only.

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