[IEEE Device Research Conference - Santa Barbara, CA, USA (24-26 June 2002)] 60th DRC. Conference Digest Device Research Conference - Advanced MEMS for photonics

✍ Scribed by Wu, M.C.; Patterson, P.R.; Hah, D.; Lee, M.-C.M.; Huang, S.; Tsai, J.-C.

• Book ID: 126612520
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 268 KB
• Edition: 60
• Category: Article
• ISBN-13: 9780780373174
• DOI: 10.1109/DRC.2002.1029486