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[IEEE Conference Record of the 1991 IEEE Industry Applications Society Annual Meeting - Dearborn, MI, USA (28 Sept.-4 Oct. 1991)] Conference Record of the 1991 IEEE Industry Applications Society Annual Meeting - High voltage modulator for pulsed ion implantation

✍ Scribed by Elmoursi, A.A.; Malaczynski, G.W.; Hamdi, A.H.

Book ID: 126082131
Publisher: IEEE
Year: 1991
Weight: 255 KB
Category: Article
ISBN-13: 9780780304536
DOI: 10.1109/IAS.1991.178310

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