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[IEEE Conference Proceedings. 1998 International Conference on Indium Phosphide and Related Materials - Tsukuba, Japan (11-15 May 1998)] Conference Proceedings. 1998 International Conference on Indium Phosphide and Related Materials (Cat. No.98CH36129) - Electrochemical etching in wet-chemical gate recess for InAlAs/InGaAs heterojunction FETs

✍ Scribed by Dong Xu, ; Enoki, T.; Suemitsu, T.; Ishii, Y.

Book ID: 120088251
Publisher: IEEE
Year: 1998
Weight: 404 KB
Category: Article
ISBN-13: 9780780342200
DOI: 10.1109/ICIPRM.1998.712787

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