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[IEEE ASDAM '98. Conference Proceedings. Second International Conference on Advances Semiconductor Devices and Microsystems - Smolenice Castle, Slovakia (5-7 Oct. 1998)] ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) - Monte Carlo simulations of the transport of sputtered particles

✍ Scribed by Macek, K.; Macek, P.; Helmersson, U.

Book ID: 125856302
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 300 KB
Category: Article
ISBN-13: 9780780349094
DOI: 10.1109/ASDAM.1998.730167

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