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[IEEE 9th International Symposium on Electrets (ISE 9) Proceedings - Shanghai, China (25-30 Sept. 1996)] 9th International Symposium on Electrets (ISE 9) Proceedings - The properties of LPcvd Si/sub 3/N/sub 4//SiO/sub 2/ film electret based on silicon

✍ Scribed by MingZhou Zhao, ; ZhiQiang Huang, ; LinZhuang Sha, ; Zhen Xu,

Book ID: 126618798
Publisher: IEEE
Year: 1996
Weight: 276 KB
Category: Article
ISBN-13: 9780780326958
DOI: 10.1109/ISE.1996.578061

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