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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Deposition of high k ZrO/sub 2/ thin films by high vacuum electron beam evaporation at room temperature

โœ Scribed by Ninglin Zhang, ; Qing Wan, ; Zhitang Song, ; Qinwo Shen, ; Chenglu Lin,


Book ID
120243293
Publisher
IEEE
Year
2001
Tongue
English
Weight
287 KB
Edition
2001 ed.
Volume
1
Category
Article
ISBN-13
9780780365209

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