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[IEEE 5th Korea-Russia International Symposium on Science and Technology. Proceedings. KORUS 2001 - Tomsk, Russia (26 June-3 July 2001)] 5th Korea-Russia International Symposium on Science and Technology. Proceedings. KORUS 2001 (Cat. No.01EX478) - High-power ion beam sources for semiconductor technologies

✍ Scribed by Opekounov, M.S.; Grushin, I.I.

Book ID: 121289806
Publisher: IEEE
Year: 2001
Weight: 563 KB
Volume: 1
Category: Article
ISBN-13: 9780780370081
DOI: 10.1109/KORUS.2001.975153

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