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[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Development of low power 13.56 MHz plasma source family

✍ Scribed by Alexandrov, A.F.; Bugrov, G.E.; Kerimova, I.; Kondranin, S.G.; Kralkina, E.A.; Pavlov, V.B.; Plaksin, V.Yu.; Rukhadze, A.A.; Vavilin, K.V.

Book ID: 120028029
Publisher: IEEE
Year: 2003
Weight: 90 KB
Category: Article
ISBN-13: 9780780379114
DOI: 10.1109/PLASMA.2003.1228688

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