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[IEEE 23rd International Conference on Microelectronics (MIEL 2002) - Nis, Yugoslavia (12-15 May 2002)] 2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) - Access to microsystem technology: the CMP services solution

✍ Scribed by Charlot, B.; Courtois, B.; Delori, H.; Paillotin, J.-F.; Torki, K.

Book ID: 127153139
Publisher: IEEE
Year: 2002
Weight: 703 KB
Volume: 1
Category: Article
ISBN-13: 9780780372351
DOI: 10.1109/miel.2002.1003147

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