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[IEEE 2014 International Symposium on Inertial Sensors and Systems (ISISS) - Laguna Beach, CA, USA (2014.02.25-2014.02.26)] 2014 International Symposium on Inertial Sensors and Systems (ISISS) - Intrinsic stress of eutectic Au/Sn die attachment and effect on mode-matched MEMS gyroscopes

✍ Scribed by Simon, Brenton R.; Sharma, Gunjana; Zotov, Sergei A.; Trusov, Alexander A.; Shkel, Andrei M.

Book ID: 124100137
Publisher: IEEE
Year: 2014
Weight: 804 KB
Category: Article
ISBN: 1479909165
DOI: 10.1109/ISISS.2014.6782529

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