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[IEEE 2014 IEEE International Frequency Control Symposium (FCS) - Taipei, Taiwan (2014.5.19-2014.5.22)] 2014 IEEE International Frequency Control Symposium (FCS) - Quartz-based vibrating MEMS fabricated using a wafer-bonding process with sealed cavities

✍ Scribed by Grousset, Sebastien; Lavenus, Pierre; Benaissa, Lamine; Taibi, Rachid; Augendre, Emmanuel; Signamarcheix, Thomas; Le Traon, Olivier; Ballandras, Sylvain

Book ID: 126605008
Publisher: IEEE
Year: 2014
Weight: 557 KB
Category: Article
ISBN: 1479949159
DOI: 10.1109/FCS.2014.6859861

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