[IEEE 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Kyoto, Japan (2014.7.2-2014.7.4)] 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Passivation of silicon surfaces by oxygen radical followed by high pressure H2O vapor heat treatments and its application to solar cell fabrication

✍ Scribed by Shigeno, Satoshi; Yoshidomi, Shinya; Hasumi, Masahiko; Sameshima, Toshiyuki

• Book ID: 125847043
• Publisher: IEEE
• Year: 2014
• Weight: 847 KB
• Category: Article
• ISBN: 4863483961
• DOI: 10.1109/AM-FPD.2014.6867178