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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Impact on film bulk acoustic resonator tempco and quality factor from boron doped SiO2 temperature compensation material

✍ Scribed by Zou, Q.; Small, M.; Lee, D.; Bi, F.; Snyder, R.; Lamers, T. L.; Choy, J.; Ruby, R.

Book ID: 121727639
Publisher: IEEE
Year: 2013
Weight: 468 KB
Category: Article
ISBN: 1467359831
DOI: 10.1109/Transducers.2013.6627037

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