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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret

✍ Scribed by Renaud, M.; Altena, G.; Goedbloed, M.; Nooijer, C.de; Matova, S.; Naito, Y.; Yamakawa, T.; Takeuchi, H.; Onishi, K.; van Schaijk, R.

Book ID: 121317062
Publisher: IEEE
Year: 2013
Weight: 413 KB
Category: Article
ISBN: 1467359831
DOI: 10.1109/Transducers.2013.6626861

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