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[IEEE 2013 Symposium on Microelectronics Technology and Devices (SBMicro) - Curitiba, Brazil (2013.09.2-2013.09.6)] 28th Symposium on Microelectronics Technology and Devices (SBMicro 2013) - Tuned electrostatic probe for RF plasma diagnostics

✍ Scribed by Cirino, Giuseppe A.; Castro, Raul M.; Pisani, Marcelo B.; Verdonck, Patrick

Book ID: 121826568
Publisher: IEEE
Year: 2013
Weight: 811 KB
Category: Article
ISBN: 147990516X
DOI: 10.1109/SBMicro.2013.6676142

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