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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Silicon nitride based mid-infrared microphotonics for sensor applications

✍ Scribed by Lin, Pao Tai; Singh, Vivek; Kimerling, Lionel; Agarwal, Anuradha Murthy

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