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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Low-noise smart sensor based on silicon nanowire for MEMS resistive microphone

✍ Scribed by Nebhen, E. Savary J.; Rahajandraibe, W.; Dufaza, C.; Meillere, S.; Kussener, E.; Barthelemy, H.; Czarny, J.; Walther, A.

Book ID: 125423134
Publisher: IEEE
Year: 2013
Weight: 866 KB
Category: Article
ISBN: 146734642X
DOI: 10.1109/icsens.2013.6688605

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