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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Long-term thermal mechanical stability of PECVD amorphous silicon carbide films for harsh environment microelectromechanical systems

✍ Scribed by LaBarbera, Michael A.; Zorman, Christian A.; Scardelletti, Maximilian C.

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