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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Cantilever-based resonant gas sensors with integrated recesses for localized sensing layer deposition

✍ Scribed by Carron, C.; Getz, P.; Su, J.-J.; Gottfried, D.S.; Brand, O.; Josse, F.; Heinrich, S. M.

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