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[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

✍ Scribed by Rahim, Rosminazuin Ab; Bais, Badariah; Majlis, Burhanuddin Yeop; Fareed, Sheik

Book ID: 126772022
Publisher: IEEE
Year: 2013
Weight: 246 KB
Category: Article
ISBN: 147991181X
DOI: 10.1109/rsm.2013.6706555

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