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[IEEE 2013 IEEE 13th International Conference on Nanotechnology (IEEE-NANO) - Beijing, China (2013.08.5-2013.08.8)] 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) - Thermoelastic analysis for freestanding micro-hotplates for micro/nano gas sensors

✍ Scribed by Torabi, Mohsen; Zhou, Xiang; Zhang, Kaili

Book ID: 121491204
Publisher: IEEE
Year: 2013
Weight: 656 KB
Category: Article
ISBN: 1479906751
DOI: 10.1109/NANO.2013.6720814

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