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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Mechanical durability of micro-nano structures surface of black silicon produced by femtosecond laser

✍ Scribed by Guo, X.B.; Ding, J.N.; Wang, S.Y.; Qiu, J.H.; Kan, B.; Yuan, N.Y.

Book ID: 121819134
Publisher: IEEE
Year: 2013
Weight: 603 KB
Category: Article
ISBN: 1467363510
DOI: 10.1109/NEMS.2013.6559938

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