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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Development of cluster ion source based on modulated pulse power magnetron sputtering technique

✍ Scribed by Zhang, C. H.; Tsunoyama, H.; Akatsuka, H.; Sekiya, H.; Nagase, T.; Nakajima, A.

Book ID: 121318291
Publisher: IEEE
Year: 2013
Weight: 430 KB
Category: Article
ISBN: 1467363510
DOI: 10.1109/NEMS.2013.6559764

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