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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A method of structural trimming to reduce mode coupling error for micro-gyroscopes

✍ Scribed by Songqi Hu, ; Hongjuan Cui, ; Kun He, ; Zhanqiang Hou, ; Peng Chen, ; Dingbang Xiao, ; Xuezhong Wu,

Book ID: 121207706
Publisher: IEEE
Year: 2013
Weight: 468 KB
Category: Article
ISBN: 1467363510
DOI: 10.1109/NEMS.2013.6559847

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