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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A triaxial monolithic silicon accelerometer with improved temperature characteristics

✍ Scribed by Peng Chen, ; Xiao, Dingbang; Chen, Zhihua; Ye Yuan, ; Wang, Xinghua; Songqi Hu, ; Yulie Wu,

Book ID: 120971454
Publisher: IEEE
Year: 2013
Weight: 553 KB
Category: Article
ISBN: 1467363510
DOI: 10.1109/NEMS.2013.6559892

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