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[IEEE 2012 Joint 21st IEEE ISAF / 11th IEEE ECAPD / IEEE PFM (ISAF/ECAPD/PFM) - Aveiro, Portugal (2012.07.9-2012.07.13)] Proceedings of ISAF-ECAPD-PFM 2012 - Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes

✍ Scribed by Chidambaram, Nachiappan; Mazzalai, Andrea; Muralt, Paul

No coin nor oath required. For personal study only.

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