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[IEEE 2012 International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) - Seville, Spain (2012.09.19-2012.09.21)] 2012 International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) - Geometrical analysis of a MEMS microphone

✍ Scribed by Rivadeneyra, Almudena; Martinez-Marti, Fernando; Palma, Alberto J.; Banqueri, Jesus; Bernardo, Raul Munoz

Book ID: 118126652
Publisher: IEEE
Year: 2012
Weight: 412 KB
Category: Article
ISBN: 1467306843
DOI: 10.1109/smacd.2012.6339444

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