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[IEEE 2012 IEEE Photonics Conference (IPC) - Burlingame, CA, USA (2012.09.23-2012.09.27)] IEEE Photonics Conference 2012 - Chemically-etched ultra-high-Q micro-cavities on a silicon chip

✍ Scribed by Chen, Tong; Lee, Hansuek; Li, Jiang; Vahala, Kerry

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