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[IEEE 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) - Graz, Austria (2012.05.13-2012.05.16)] 2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings - Displacement measurement of planar stage by diffraction planar encoder in nanometer resolution

✍ Scribed by Fan, Kuang-Chao; Liao, Bo-Hsuan; Chung, Yi-Cheng; Chung, Tien-Tung

Book ID: 120035947
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 351 KB
Category: Article
ISBN: 1457717719
DOI: 10.1109/I2MTC.2012.6229209

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