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[IEEE 2012 IEEE 13th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2012) - Altai, Erlagol, Russia (2012.07.2-2012.07.6)] International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices - Peculiarities of chemical etching of the annealed proton exchange channel waveguides fabricated on Z cut of lithium niobate crystal

✍ Scribed by Kichigin, Vladimir I.; Petukhov, Igor V.; Mushinsky, Sergey S.; Minkin, Alexander M.; Oborin, Vladimir A.; Shevtsov, Denis I.; Volyntsev, Anatoly B.

Book ID: 120033032
Publisher: IEEE
Year: 2012
Weight: 582 KB
Category: Article
ISBN: 1467325198
DOI: 10.1109/EDM.2012.6310224

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