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[IEEE 2012 IEEE 13th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2012) - Altai, Erlagol, Russia (2012.07.2-2012.07.6)] International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices - Application of surface acoustic wave spectroscopy for study of physical properties of thin films

✍ Scribed by Shayapov, Vladimir R.

Book ID: 118232672
Publisher: IEEE
Year: 2012
Weight: 585 KB
Category: Article
ISBN: 1467325198
DOI: 10.1109/edm.2012.6310197

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