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[IEEE 2012 9th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON 2012) - Phetchaburi, Thailand (2012.05.16-2012.05.18)] 2012 9th International Conference on Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology - Patterning of burnishing head using SU-8 hard mask fabricated by deep X-ray lithography

✍ Scribed by Maneekat, Ch.; Phatthanakun, R.; Siangchaew, K.; Leksakul, K.

Book ID: 118257575
Publisher: IEEE
Year: 2012
Weight: 928 KB
Category: Article
ISBN: 1467320242
DOI: 10.1109/ecticon.2012.6254197

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