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[IEEE 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2012.05.15-2012.05.17)] 2012 SEMI Advanced Semiconductor Manufacturing Conference - Carbonized surface curing for etch-back process

✍ Scribed by Sungjin Jang, ; In-cheol Kim, ; Kyu-yeol Lee, ; Soo-cheol Lee, ; In-soo Cho, ; Byoung-deog Choi,

Book ID: 111962430
Publisher: IEEE
Year: 2012
Weight: 394 KB
Category: Article
ISBN: 146730350X
DOI: 10.1109/asmc.2012.6212891

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