[IEEE 2012 1st International Symposium o
โฆ LIBER โฆ
[IEEE 2012 1st International Symposium on Physics and Technology of Sensors (ISPTS) - Pune, India (2012.03.7-2012.03.10)] 2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1) - Optimization of RF sputtered PZT thin films for MEMS cantilever application
โ Scribed by Joshi, Abhay B.; Gangal, S. A.; Bodas, Dhananjay; Rauch, Jean Yves
- Book ID
- 118147957
- Publisher
- IEEE
- Year
- 2012
- Weight
- 154 KB
- Category
- Article
- ISBN
- 1467310425
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