[IEEE 2012 19th Biennial University/Government/Industry Micro/Nano Symposium (UGIM) - Berkeley, CA, USA (2012.07.9-2012.07.10)] 2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM) - A Phosphine Sub Atmospheric Delivery System (SADS) Applied to Low Pressure Chemical Vapor Deposition (LPCVD) of In-Situ Doped Polysilicon

✍ Scribed by Bowser, Jerry; Young, William; Chen, Lei; Luciani, Vincent

• Book ID: 126711062
• Publisher: IEEE
• Year: 2012
• Weight: 108 KB
• Category: Article
• ISBN: 1457717506
• DOI: 10.1109/UGIM.2012.6247086