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[IEEE 2011 Symposium on Photonics and Optoelectronics (SOPO 2011) - Wuhan, China (2011.05.16-2011.05.18)] 2011 Symposium on Photonics and Optoelectronics (SOPO) - PECVD Grown SiO2 Film Process Optimization

✍ Scribed by Song, Ping; Lian, Jie; Gao, Shang; Li, Ping; Wang, Xiao; Wu, Shiliang; Ma, Zheng

Book ID: 121715850
Publisher: IEEE
Year: 2011
Weight: 192 KB
Category: Article
ISBN: 1424465559
DOI: 10.1109/sopo.2011.5780651

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