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[IEEE 2011 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Kota Kinabalu, Sabah, Malaysia (2011.09.28-2011.09.30)] 2011 IEEE Regional Symposium on Micro and Nano Electronics - Design, modeling and simulation of CMOS MEMS cantilever for carbon dioxide gas sensing

✍ Scribed by Mirza, Asif; Khir, Mohd Haris Md; Dennis, John Ojur; Ashraf, Khalid; Hamid, Nor Hisham

Book ID: 125508423
Publisher: IEEE
Year: 2011
Weight: 416 KB
Category: Article
ISBN: 1612848451
DOI: 10.1109/RSM.2011.6088353

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