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[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Dual mode cMUTs fabricated with LPCVD sacrificial release process

โœ Scribed by Certon, Dominique; Senegond, Nicolas; Gross, Dominique; Legros, Mathieu; Boulme, Audren; Roman, Benoit; Teston, Franck; Ferin, Guillaume


Book ID
121266910
Publisher
IEEE
Year
2011
Weight
366 KB
Category
Article
ISBN
1457712512

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