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[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Micro-machined resonant accelerometer with high sensitivity

✍ Scribed by Wang, Junbo; Shang, Yanlong; Tu, Sheng; Liu, Lei; Chen, Deyong

Book ID: 127345851
Publisher: IEEE
Year: 2011
Weight: 271 KB
Category: Article
ISBN: 1612847757
DOI: 10.1109/nems.2011.6017409

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