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[IEEE 2011 IEEE 38th International Conference on Plasma Sciences (ICOPS) - Chicago, IL, USA (2011.06.26-2011.06.30)] 2011 Abstracts IEEE International Conference on Plasma Science - Recirculating Planar Magnetron modeling and experiments

✍ Scribed by Franzi, Matthew; Gilgenbach, Ronald M.; French, David M.; Hoff, Brad W.; Lau, Y. Y.; Simon, David; Luginsland, John W.

Book ID: 124053164
Publisher: IEEE
Year: 2011
Weight: 134 KB
Category: Article
ISBN: 1612843301
DOI: 10.1109/PLASMA.2011.5993338

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