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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - A simple all-parylene in-channel pop-up checkvalve with controllable cracking pressure

✍ Scribed by Lin, Jeffrey Chun-Hui; Kang, Clark Dongyang; Tai, Yu-Chong

Book ID: 121317001
Publisher: IEEE
Year: 2011
Weight: 1013 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734619

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