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[IEEE 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2011) - Phoenix, AZ (2011.01.17-2011.01.19)] 2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems - Design and fabrication considerations in developing high-Q MEMS capacitors and inductors

✍ Scribed by Rais-Zadeh, Mina

Book ID: 115533590
Publisher: IEEE
Year: 2011
Weight: 441 KB
Volume: 0
Category: Article
ISBN: 1424480604
DOI: 10.1109/sirf.2011.5719335

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