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[IEEE 2011 4th International Conference on Mechatronics (ICOM) - Kuala Lumpur, Malaysia (2011.05.17-2011.05.19)] 2011 4th International Conference on Mechatronics (ICOM) - Novel MEMS fully differential capacitive transducer design and analysis

✍ Scribed by Ya, Ma Li; Khan, Sheroz; Nordin, Anis Nurashikin; Al-Khateeb, Khalid A. S.; Islam, Muhammad Rafiqul; Naji, Ahmed Wathik

Book ID: 120982509
Publisher: IEEE
Year: 2011
Weight: 256 KB
Category: Article
ISBN: 1612844359
DOI: 10.1109/ICOM.2011.5937152

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