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[IEEE 2011 24th IEEE Canadian Conference on Electrical and Computer Engineering (CCECE) - Niagara Falls, ON, Canada (2011.05.8-2011.05.11)] 2011 24th Canadian Conference on Electrical and Computer Engineering(CCECE) - A simulator for local anodic oxidation of silicon surfaces

✍ Scribed by Filipovic, Lado; Ceric, Hajdin; Cervenka, Johann; Selberherr, Siegfried

Book ID: 120020038
Publisher: IEEE
Year: 2011
Weight: 262 KB
Category: Article
ISBN: 1424497884
DOI: 10.1109/CCECE.2011.6030543

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