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[IEEE 2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011) - Erlagol, Altai, Russia (2011.06.30-2011.07.4)] 2011 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Proceedings - Self-aligned multilayer dielectric “dummy gate” technology for GaAs HFET fabrication

✍ Scribed by Arykov, Vadim S.; Gavrilova, Anastasia M.; Dedkova, Olga A.; Kagadei, Valery A.

Book ID: 118258243
Publisher: IEEE
Year: 2011
Weight: 210 KB
Volume: 0
Category: Article
ISBN: 1612847935
DOI: 10.1109/edm.2011.6006880

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